{"product_id":"9780521022347","title":"Sub-Half-Micron Lithography for ULSIs","description":"\u003cp\u003eThis book describes advanced techniques under development in Japan and elsewhere that represent the key to future semiconductor-device fabrication. Several important lithography methods, such as deep UV, X-ray, electron-beam, and focused ion-beam lithography are described in detail by experts. The principles underlying each of the techniques are illustrated at the beginning of each chapter.\u003c\/p\u003e","brand":"Cambridge University Press","offers":[{"title":"Default Title","offer_id":42732040290379,"sku":"00000_00000_00000_00000","price":1889.62,"currency_code":"THB","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0641\/0023\/7387\/files\/9780521022347-1.jpg?v=1783343156","url":"https:\/\/kinokuniya.co.th\/products\/9780521022347","provider":"Books Kinokuniya Thailand","version":"1.0","type":"link"}